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| ATLEX-S Specifications | |||||
| Gas Medium | ArF | KrF | Units | ||
| Wavelength | 193 | 248 | nm | ||
| High Voltage Switching Technique | Solid State Switch | Solid State Switch | |||
| Max. Rep. Rate | 300 | 500 | 300 | 500 | Hz |
| Max. Pulse Energy 1 | 10 | 10 | 15 | 15 | mJ |
| Max. Average Power | 2,4 | 4 | 4 | 6 | W |
| Pulse Duration 2 | 5 – 8 | ns | |||
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |||
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |||
| Energy Stability (standard deviation) | < 3=""> | % | |||
| Dimensions (LxWxH) click here for details | 630 x 400 x 300 | mm | |||
| Weight | 65 | kg | |||
| Cooling | Air | ||||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||||
