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| ATLEX-LR Specifications | ||
| Gas Medium | ArF | Units |
| Wavelength | 193 | nm |
| Max. Pulse Energy 1 | 12 | mJ |
| Max. stab. Energy | 10 | mJ |
| Pulse Duration 2 | 5 | ns |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad |
| Energy Stability (standard deviation) | <> | % |
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm |
| Weight | 60 | kg |
| Cooling | Air | |
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | |
