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| ATLEX-1000-I Specifications | |||
| Gas Medium | ArF | KrF | Units |
| Wavelength | 193 | 248 | nm |
| High Voltage Switching Technique | Solid State Switch | ||
| Max. Pulse Energy 1 | 10 | 15 | mJ |
| Max. Average Power | 8 | 10 | W |
| Max. Rep Rate | 1000 | Hz | |
| Pulse Duration 2 | 5 – 8 | ns | |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |
| Energy Stability (standard deviation) | <> | % | |
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm | |
| Weight | 60 | kg | |
| Cooling | Cooling Air / Optional Liquid | ||
| Power requirement | 230 VAC / 10 A / 1 phase / 50-60 Hz | ||
