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由模块联结成系统有三种方法：

①无底板，靠模块间接口直接相联，然后再固定到相应导轨上。德维森公司的V80系列PLC就是这种结构，比较紧凑。

②有底板，所有模块都固定在底板上。如德维森公司的PPC11、PPC22和PPC31系列PLC，OMRON公司的C200Ha机，CV2000等中、大型机就是这种结构。它比较牢固，但底板的槽数是固定的，如3、5、8、10槽等等。槽数与实际的模块数不一定相等，配置时难免有空槽。这既浪费，又多占空间，还得占空单元把多余的槽作*。

③用机架代替底板，所有模块都固定在机架上。这种结构比底板式的复杂，但更牢靠。一些特大型的PLC用的多为这种结构。

郑娟萍

厦门仲鑫航自动化设备有限公司 

按生产厂家分

目前生产PLC的厂家较多。但能配套生产，大、中、小、微型均能生产的不算太多。较有影响的，在中国市场占有较大份额的公司有：

德国西门子公司：它有S5系列的产品。有S5－95U、100U、115U、135U及155U。135U、155U为大型机，控制点数可达6000多点，模拟量可达300多路。zui近还推出S7系列机，有S7-200（小型）、S7-300（中型）及S7-400机（大型）。性能比S5大有提高。

日本OMRON公司：它有CPM1A型机，P型机，H型机，CQM1、CVM、CV型机，Ha型、F型机等，大、中、小、微均有，特别在中、小、微方面更具特长，在中国及世界市场，都占有相当的份额。

日本三菱公司的PLC也是较早推到我国来的。其小型机F1前期在国内用得很多，后又推出FX2机，性能有很大提高。它的中、大型机为A系列。AIS、AZC、A3A等。

日本日立公司也生产PLC，其E系列为箱体式的。基本箱体有E-20、E-28、E－40、E－64。其I/O点数分别为12/8、16/12、24/16及40/24。另外，还有扩展箱体，规格与主箱体相同其EM系列为模块式的，可在16～160之间组合。

日本东芝公司也生产PLC，其EX小型机及EX－PLUS小型机在国内也用得很多。它的编程语言是梯形图，其的编程器用梯形图语言编程。另外，还有EX100系列模块式PLC，点数较多，也是用梯形图语言编程。

日本松下公司也生产PLC。FP1系列为小型机，结构也是箱体式的，尺寸紧凑。FP3为模块式的，控制规模也较大，工作速度也很快，执行基本指令仅0?l微秒。

日本富士公司也有PLC。其NB系列为箱体式的，小型机。NS系列为模块式。

美国GE公司、日本FANAC合资的GE－FANAC的90－70机也是很吸引人的。据介绍。它具有25个特点。诸如，用软设定代硬设定，结构化编程，多种编程语言，等等。它有914、781／782、771／772、731／732等多种型号。另外，还有中型机90－30系列，其型号有344、331、323、321多种；还有90－20系列小型机，型号为211。

3 AMAT 0021-11104 Spacer, TC AMP/HTR PWR ENCL, 300 MM WKZ 

 UNIT UFC-1661E, 5 SLM NH3, MFC 1661, Novellus 22-190305-00

NEW AMAT 4020-00230 Regulator, Parker veriflo, 54017395, SQ420E1002PFSBFM

ASYST 4002-6446-01 Wafer Mapper assy with Sunx sensor, PCB 3200-1229-01

NEW Kalrez 17471 oring compond 4079, 22-154780-01, 18.931 x 0.210 inch

4 NEW Norcal product AMAT 3870-01244, Isolation valve KF40 staggered port

Novellus Cu, 200mm ceramic ring 196mm cwp low profile 02-130754-00

SMC Cold fluid outlet and return BES-7192-10 AMAT 0190-18329 #2

AMAT 0021-27877 30056500-466-038, 0021-88686 gas feed assy

ENI OEM-10B RF GENERATOR OEM-10B-8, 200-220 VAC, 1250W, looks very clean

AMAT 0660-01819 CARD PC MULTIFUNCTION I/O 

100 New Thomson 18281A, Super 8 Cartridge ball bushing linear bearings

Entegris NT Integrated Flow Controller 6500-T2-F02-D12-A-P1-U1

Motor API Positron, 50419523000, 55.7:1 Ratio, for Leica, Escap

PARKER OEM750 Stepper motor driver

Vacuum Flange with KF16 connection and ISO bellow flange for vacuum pump P539331

Asyst crossing automation 9701-2157-01, 4301239986 assembly, ACTV POD

NEW Perkin Elmer board MAGK 019 PCB assembly 851-9953-003

NEW Perkin Elmer Board AS102, 851-8242-006 PCB assymbly

Novellus 02-140949-00 REV C Main system start stop module 

ASSY, PCB driver, drive PSB 500049532, AGV, BOARD, ARM(DDRV-U)

 UNIT UFC-1100, N2, 200 sccm, MFC 1100, C11-16847

Shinko 3FE113C005400 Assembly, Printed Circuit, Panel 3

VAT pressure controller PM-6  810-49867 with VAT 93728-R1

 UNIT 8165, SiH4, 30 sccm, MFC 8165, 3030-12078W

2 NEW SMC SS5V1-DUO02376 Pneumatic manifold

MKS CDN391R AS01391-21-1 PCB

Moeller Main Power circuit breaker IEC/EN 60947 690V 400A

Asyst 9701-3465-01-D, END EFFECTOR, VAC, WIDE UPPERS, Applied Ceramics

EPSON RAIOC-33 PROGRAMMABLE CONTROLLER PLC MAX3A DC24V

23 AMAT 1230-01246 SKT MED BI-PIN LAMP BUTTON TURN LOCK

ILLUMINA 250878 PCU-201  ACHIMEDES, 250659, DCDC converter CPD250-4530G

COLD CATHODE PIRANI GAUGE INFICON AG, LI-9496 BALZERS MPG400, 351-011, 398229

Motion Control Assembly w/ 4 advanced motion control Servo Controllers X02B30A8Q

3 novellus 0275-111140, Tuck Bi3-Q06-AN6X2, proximity sensor

NEW GE Fanuc IC200CPU001-DH, CPU, W/CFG MEM V2.31

Photonics Inc P0T301SL SD Position Sensing Amplifier, Single Axis w/ New Wave

AMETEK Dycor RGA  Q100M head, cable, Osaka TGC51CA turbo, TC61 controller

Asyst 4002-6633-01 Spartan EFEM Wafer Mapper Shuttle, RFID, CROSSING AUTOMATION

 Lot of 5 Black Box KV3108SA 8 position KVM switch box, Look new sell as used

NEW Brooks 002-8904-02 End effector assy, 2 piece, 13.08, Novellus 20-155073-00

XINIX 1014 Endpoint Controller, 398250, Powers up

Iwaki Mag-Drive Pump CMD-280 Head (ft) 42, Capacity (GPM) 2.5

NEW ASYST ATR-9000 9700-6584-01 Rev A Advan Tag RFID

3 Siemens PLC, 6ES7 235-0KD22-0XA0, 6EP1 331-1SL11, 6ES7 214-1AD23-0XB0

Ransco Fast Rate Cycling Oven with LN2 low pressure injection Despatch chamber

Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400

2 AMAT 0010-07824, G-PLIS liquid STEC injector assembly manifold Heater jackets 

ATTOco controlSYS PLC W DISPLAY ATT0-CPU44 W/ 6 ATT0-xx, samsung PVU-2424,relay 

2 Vacuum Flange with KF16 connection,ISO bellow flange for vacuum pump NRY12J526

Novellus / IPEC 2805-770376,  New, Motion control assy w Warner SS2000D6 Slo-Syn

used Mitsubishi FX2N-48MR-DS  programmable controller plus components SN 6z0485 

5 AMAT 3870-05747 Ham-Let UCV HMB1-4VKLC-GM4GF4GF4-2.35 Diaphragm Valve

3 Swagelok SS-FL4RM4RM4-24 AMAT 3400-01885 convoluted, flexible, SS, hose

Watkins Johnson 7376-001, WJ wafer loader return shuttle, WJ999 or WJ1000,

2 Asyst 9701-2143-01 wafer mapper, assembly, FRU, OPT, 3200-1229, 4002-6446-01

SVG Aviza card cage 600072-05 with top motherboard 600057-01 and 10 boards

Novellus 27-163237-00 controller, Trust automation TA2026 CVD Tin 1 AXIS WTM 

Aviza 965158-000 Card, Input, Temperature Controller

NEW Bodine 32X5BEPM-W2, Gear motor 120VDC 1/8 hp 

8 Furon DV2-144NCD2, P/N 1103307 selinoid valve, 24 VDC, 50/60

AMAT cable assembly 0150-02632 N(M), R/A to N(M), STR RG-21, K-TEC cable 

Lot of 2 Novellus 02-140949-00 REV C, Main system start stop module, 100996

Novellus  02-158811-00 Main system power panel w/ scrubbed exhaust for PVD REV C

NEW Chemraz Greene tweed 9277-SS592, 11.484 ID x 0.139 CX INCH, 78-2796 compound

national instruments GPIB-120A, Bus Expander/isolator, 1S1555E-31, 50-60Hz

Disco ES EAUF-965001 Operation Panel Unit KPU-OPN-98A00

ASYST 9701-3102-01 Wafer handler end effector robot blade, Thin AEG EE, 399338

ASYST 9701-3102-01 Wafer handler end effector robot blade, Thin AEG EE, 399339

Asyst Falcon Alignment K Plate Tool K-Plate 1000-0377-03 FS Setup Fixture 400689

AMAT 0190-11995 Ampoule Heater, 1.2L 600W 120VAC 85 

Asyst Spartan EFEM Sorter RFID reader assy 3200-1225-02, 4002-6519-01

Working RFPP RF10S,  AE RF-10S, RF Generator, 7520709010, Mattson, Varian T1575V

NEW AE Advanced energy 3150274-008 RF match 27-255873-00 with CD manual

4 International power devices QWS2412HS-Q, DC-DC convertor

MKS 022-03161-2D2 Microvision Plus, RGH Control Unit, Transpector Power Supply

NEW ASYST 9701-2148-02 END EFFECTOR CERAMIC, 398516, 4002-8136-01R

9 NEW Twin splitter for VGA with 2 output splitter, power supply, Model 1035

6 new SVG 913999-001, gas manifolds with 2 Swagelok 6LV-D4D333P-AA valves each

AMAT 0010-00393, Hose ASSY, 5O FT With quick disconnect fitting, Heat Exchanger

Lot of 3 new in box Futurestar 218-0035 flow meters with teflon float

AMAT 1310-01091 TC Dual TYPEK SST MNT 1/2-20 KNURL HD, WATLOW

Omron S3D8-CKF-US Sensor Controller, Omron E3C-WH4F

Daihen SGM-15B SMA-15B AMAT 0010-30397 1.5kW Microwave magnetron,AMAT 0920-01044

Yaskawa RC/ELC1, SRCII Robot controller, DDMQF-SR2230, used, in OEM box,

MKS Portable Baratron Measure System PBMS2B, PDR2000 Dual Capacitance Manometer

SMC Flow Switch PF2W720-03-67-Q

Semitool Solvent tool Rotor IMBT12-450-375M-185, RPM Max 2800, 34798-1

OPTO 22 G4RD remote digital 16 channel brainboard, Mistic, 0125-717663

Optoelectronics G104X1- L03 TFT Liquid Crystal Display module w LED backlight

Vexta 5-Phase Stepping motor PH566M-NBA +Driver UDx5114NA

AE 3152426-113, Pinnacle DC power supply with 3152360-001 interface X9669

Semiconductor Systems 02-10720 Spin Logic PCB Assy w/ 02-10719 And 02-10723

AMAT 0020-18062 HDPCVD Ultima Chamber Ceramic Dome, HDP CVD with Center Hole

1B87-512643-11 ASSY, SMIF-4 POD BASE 

Tokyo Electronic Industry TE6036A7 touch screen monitor

Newport  X-TMI111 Force transducer display with transducer SSB-AJ-500 

CTI on board water  pump 8124400G002 8"  F configuration

perkin elmer backing plate AlCu target 8 inch, suptter PVD tool

used Mitsubishi FX2N-48MR-DS  programmable controller plus components SN 770601

used Mitsubishi FX2N-48MR-DS  programmable controller plus components SN 149043

5 Toshiba VFS9-2015PM-WN Transistor inventor, motor protection device, 969533

4 NEW  Linear actuator 400MM rail two long NP105, 95086-52

Brooks CLMC-JA, Cluster module controller 16 Dig I/O, 32 AI/O, 32 Relay I/O

Lot of 2 NEW BECO MAN-103307 dual valves with teflon block

2 Kokusai Electric DN-130P, Heater Over Temperature Protection Unit 202086031

NEW ASYST 04600-001 Rotator assy, send side, ergo, Novellus 94-1173

Mitsubishi Melsec FX0N-24MR-ES Programmable controller, FX0N-3A

Merlin engineering works, VCF PWA 4586, FAB 4585 B, ME1006A

NEW Brooks 149345, 27-334953-00 Robot Electronic module, AQR7, CIP, 

used Mitsubishi FX2N-48MR-DS  programmable controller plus components 

Siemens 3RT1044-1AP00 Contractor 3RT10 30kW 230Vac

10 Furon DV2-144NCD2, P/N 1103307 solenoid valve, 24 VDC, 50/60, S077

Lot of 2 VAT 02112-AA24-AQX1/0110, 02012-BA24-ACA1/001A used Actuators

3 LAM 492-17304-00 Manifold, Solenoid, M6, 793713-ECOSYS, 5 Of SV1A00-5FU Valve

AMAT 1350-01190 XDCRPRESS CT27A11TBC9 10TORR 1/2 FVCR .12% DNET MANOM 

Kalrez Ultrapure 78-0161 Oring compound 8101UP, 10-1/2 x 10-7/8 x 3/16 INCH

Lot of 10 Furon DV2-144NCD2, P/N 1103307 solenoid valve, 24 VDC, 50/60, 

Lot of 8 new SMC NCDA1B400-0400N-A53L-XB9C6, cylinder assy with 2 switches

3 new Todd products SC24-11C, power supplies, 115/230VAC 6A/3A w/ paper work

NEW Berkeley Process controls M10, Servo motor cables 2PAMP3M1 and 2PM9, 966434

Asyst 9701-3465 Applied Ceramics END EFFECTOR VAC WIDE LWR assy, 9701-3465-02-D

AMAT 0226-97934 thermal fluid outlet and return Heat Exchanger hose, QD fittting

AMAT 1150-01029 Fluoroware Probe Sensor SGL-Chan 3M

4 ULTREX gas line filter, 3 inch mini, VCR, 28235G, matrix 94-8001

AE Advanced energy MDX-20K master 3152223-003Y power supply RF generator

Kokusai electric CX-2000 Tube controller for furnace 5UOT127665R

Used Millipore CDLD2106E, cold cathode gauge,  0-100 Torr CDLD-21S06E

AMAT 0090-01019 Convenience Outlet Assembly, 15A Cord 

Crossing Automation Asyst 9701-3279-01 Robot End Effector 

2 AMAT 3300-11493 Fitting, Bulkhead 1-1/2 Tube

Plasma Reactor NPR-802L New Power Plasma Corp.

2 Used Fusion Semiconductor G03 Ozone Asher. Dual chamber, Dual robot arm

APEX 3513 RFgenerator Power supply A3M3K000EA120B001A, S9530

APEX 3513 RFgenerator Power supply A3M3K000EA120B001A, S3106

VAT 65040-PA52-ALV1 used heated pendulum valve

NEW Novellus Bender RCM470LY-13 Residul current monitors AC2935A1, RCM serie 470

Asyst Shinko 3FC120A003700-2 Assembly, Assy, Gyro, GRS 03-02R, Silicon sensring 

N2/IPA BUBBLER, MITSUBISHI E300 TYPE 04300, ME1SEC, PEPPERL+FUCHS 2779, VERIFLOW

8 new insulator heat blanket KF 40 flange 6789-00 metron HPS 4515-0016

Asyst Shinko 3FC120B030600 Wiring Harness OHT Vehicle 1, F11X4246

2 National display system DM-X15/ZN, touch screen assy 90X0080, 15 inch

National display systems DM-S12/ZN, assy 90X0002, 12 inch touch screen

MKS 250B, MKS 250B-1-D Pressure flow controller, Novellus 00-671311-00